@article {458,
	title = {High-accuracy profiler that uses depth from focus},
	journal = {Applied Optics},
	volume = {33},
	year = {1994},
	pages = {686 - 689},
	abstract = {<p>A CCD-based confocal microscope system that is used to measure accurate three-dimensional surface profiles is reported. For a field of view of 500 \&micro;m, surface samples spaced at 12 \&micro;m on smooth specular test objects are simultaneously resolved in depth to \&nbsp; 1 \&micro;m (depending on the surface being observed). A precision of 0.1 \&micro;m is obtained for a mirrored surface for a field of view 400 \&micro;m wide. Simple scaling and sampling results permit these results to be extended to other apparatus dimensions and range sampling intervals.</p>
},
	doi = {http://dx.doi.org/10.1364/AO.33.000686},
	url = {http://ao.osa.org/abstract.cfm?URI=ao-33-4-686},
	author = {P Fieguth and D H. Staelin}
}
