519-888-4567 x35319
Location: 
ERC 1001
Research Expertise
  • Advanced processing technologies for microelectronic devices and process modeling
  • Low-permittivity dielectric films and device integration
  • Low-thermal budget, rapid thermal, and optothermal processing in silicon
  • Micro-electro-mechanical systems (MEMS) technology, silicon micromachining
  • Nanocrystalline semiconductors and nanostructures
  • Silicon-based crystalline and thin-film photovoltaic devices: design and fabrication technology

Centre for Advanced Photovoltaic Devices and Systems

Group(s): 
Powertrain and Emissions→Fuel cells; N to S profiles