Lab equipment primary users

The following is a list of lab equipment and the primary contact person for each piece of equipment:

  • Reactive ion etching (RIE): Scott Chen, Ahmed Aziz
  • Plasma enhanced chemical vapour deposition (PECVD): Ahmed Aziz
  • E-Beam evaporator: TBD
  • Sputtering system: TBD
  • Mask aligner/photolithography: TBD
  • Carbon dioxide (CO2) dryer: Sara Attar
  • Hydrogen fluoride (HF) release process: TBD
  • Dektak: Scott Chen, Geoff Lee
  • Electroplating system: Oliver Wong

Last Updated: April 21, 2014