@article{636,
  author = {Shabnam Rasoulian and Luis Ricardez-Sandoval},
  title = {Robust multivariable estimation and control in an epitaxial thin film growth process under uncertainty},
  year = {2015},
  journal = {Journal of Process Control},
  volume = {34},
  pages = {70-81},
  publisher = {Elsevier},
  doi = {10.1016/j.jprocont.2015.07.002},
}