@article{641, author = {Shabnam Rasoulian and Luis Ricardez-Sandoval}, title = {Worst-case and distributional robustness analysis of a thin film deposition process}, year = {2015}, journal = {IFAC-PapersOnLine}, volume = {48}, number = {8}, pages = {1126-1131}, publisher = {Elsevier}, doi = {10.1016/j.ifacol.2015.09.119}, }