@inproceedings{140,
  author = {Nasim Paryab and Hamid Jahed and Amir Khajepour},
  title = {Failure mechanisms of MEMS thermal actuators},
  year = {2006},
  journal = {ASME 2006 International Mechanical Engineering Congress and Exposition},
  pages = {397-406},
  publisher = {American Society of Mechanical Engineers Digital Collection},
}