@article{102, author = {Dogu Ozyigit and Farman Ullah and Ahmet Gulsaran and Bersu Azer and Ahmed Shahin and Kevin Musselman and Michal Bajcsy and Mustafa Yavuz}, title = {Manufacturing of quantum-tunneling MIM nanodiodes via rapid atmospheric CVD in terahertz band}, year = {2023}, journal = {Scientific Reports}, volume = {13}, pages = {20733}, }