@inproceedings{124, author = {Masoud Akbari and Viet Nguyen and Gaƫtan Debontride and Martial Defoort and Skandar Basrour and Kevin Musselman and David Munoz-Rojas}, title = {Atmospheric-Pressure Spatial Atomic Layer Deposition (AP-SALD) Of Metal Oxides for Gravimetric Gas Sensing Applications}, year = {2021}, journal = {2021 MRS Fall Meeting}, }