@article{27,
  author = {Abdullah Alshehri and Nathan Nelson-Fitzpatrick and Khaled Ibrahim and Kissan Mistry and Mustafa Yavuz and Kevin Musselman},
  title = {Simple plasma assisted atomic layer deposition technique for high substitutional nitrogen doping of TiO2},
  year = {2018},
  journal = {Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films},
  volume = {36},
  number = {3},
  pages = {031602},
  publisher = {American Vacuum Society},
}