@article{3,
  author = {Travis Yeow and Kissan Mistry and Ahmed Shahin and Mustafa Yavuz and Kevin Musselman},
  title = {Atmospheric-pressure spatial chemical vapor deposition of tungsten oxide},
  year = {2020},
  journal = {Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films},
  volume = {38},
  number = {5},
  pages = {052411},
  publisher = {American Vacuum Society},
}