@article{36,
  author = {Kevin Musselman and Chukwuka Uzoma and Michael Miller},
  title = {Nanomanufacturing: high-throughput, cost-effective deposition of atomic scale thin films via atmospheric pressure spatial atomic layer deposition},
  year = {2016},
  journal = {Chemistry of Materials},
  volume = {28},
  number = {23},
  pages = {8443-8452},
  publisher = {American Chemical Society},
}