@inproceedings{43,
  author = {D Munoz-Rojas and CL Armstrong and AT Marin and RLZ Hoye and KP Musselman and JL MacManus-Driscoll},
  title = {Fast and scalable thin film deposition, doping and surface engineering using Atmospheric Pressure Spatial ALD (AP-SALD): application to new generation PV},
  year = {2015},
  journal = {1st RAFALD workshop},
}