@inproceedings{53, author = {Claire Armstrong and Kevin Musselman and David Muñoz-Rojas and Judith MacManus-Driscoll}, title = {Low Temperature Deposition of NbOx/TiO2 Bi-Layer Films for Solar Cells Using Atmospheric Atomic Layer Deposition}, year = {2014}, journal = {2014 E-MRS spring meeting}, }