@inproceedings{8,
  author = {Kevin Musselman and Abdullah Alshehri and Kissan Mistry and Alexander Jones and Jhi Loke and Viet Nguyen and David Muñoz-Rojas},
  title = {In-Situ and Combinatorial Techniques for Spatial ALD},
  year = {2020},
  journal = {ECS Meeting Abstracts},
  number = {23},
  pages = {1666},
  publisher = {IOP Publishing},
}