@article{82,
  author = {Poojitha Durgamahanti and Soumyadeep Saha and Louis-Vincent Delumeau and Tristan Grovu and Craig Wheaton and Kerim Samedov and Kevin Musselman},
  title = {Atmospheric Pressure Spatial Atomic Layer Deposition of Silicon Oxide Using DIPAS and Ozone},
  year = {2025},
  journal = {The Journal of Physical Chemistry C},
  volume = {129},
}