@article{84, author = {Robert Hoye and David Muñoz-Rojas and Zhuotong Sun and Hayri Okcu and Hatameh Asgarimoghaddam and Judith MacManus-Driscoll and Kevin Musselman}, title = {Spatial Atomic Layer Deposition for Energy and Electronic Devices}, year = {2025}, journal = {PRX Energy}, volume = {4}, pages = {017002}, }