@article{95,
  author = {André Maas and Kissan Mistry and Stephan Sleziona and Abdullah Alshehri and Hatameh Asgarimoghaddam and Kevin Musselman and Marika Schleberger},
  title = {Growth of p-doped 2D-Mo S 2 on A l 2 O 3 from spatial atomic layer deposition},
  year = {2024},
  journal = {Journal of Vacuum Science & Technology A},
  volume = {42},
}