@article{99, author = {Hatameh Asgarimoghaddam and Qiaoyun Chen and Fan Ye and Ahmed Shahin and Bo Song and Kevin Musselman}, title = {Effect of different oxygen precursors on alumina deposited using a spatial atomic layer deposition system for thin-film encapsulation of perovskite solar cells}, year = {2023}, journal = {Nanotechnology}, volume = {35}, pages = {095401}, }