User fees in the Centre are based on the self-recovery of operating costs. The fee structure includes two classes of users: "academic" and "non-academic". There are also two types of charges: per hour and per term/annual. In case of minor facility usage, the lab users are charged on an hourly basis. The time is estimated by manager based on the process description provided by the user and by the time booked by the user through the online booking system. In case of major lab usage (e.g., full-time graduate student involved in device fabrication research), a flat annual fee is charged every term in equal installments. The fee structure including the rates is to be reviewed each term based on the number of lab users and existing financial support. The foundation for the facility operation is a not-for-profit principle. The goal is to maximize the creative use and the scientific and technological output of the facility while operating it cost-efficiently for the users in the no-revenue fashion.
The users are responsible for purchasing supplies or special materials for project-specific needs (masks, special metals or chemicals, equipment modifications such as wafer carriers, etc.)
Equipment operation training and process operator services are subject to charge. Training fees are charged as an hourly rate; the number of hours charged to any user is fixed. There is also no charge for the introductory safety training. However, projects that require major technical assistance outside the lab might be subject to charges. All lab equipment and access fees are subject to change.
(bracketed rates are charges for the involvement of G2N personnel, including training charges)
| Equipment/Service | Rate external | Rate academic | Period |
|---|---|---|---|
| Analytical instrumentation | $100.00 | $25.00 | hour |
| G2N lab access | $3,800.00 | $1,900.00 | term |
| Incidental materials | $30.00 | ||
| Probe station (G2N operation) | $250.00 ($350.00) | $75.00 | hour |
| Project cost | $75,000.00 | $75,000.00 | project |
| Training costs | $200.00 | $100.00 | hour |
| Equipment/Service | Rate external | Rate academic | Period |
|---|---|---|---|
| Edwards sputtering system (G2N operation) | $200.00 ($300.00) | $50.00 ($100.00) | hour |
| Intlvac thermal/E-beam evaporator (G2N operation) | $250.00 ($350.00) |
$75.00 ($150.00) |
hour |
| Plasmatherm plasma-enhanced chemical vapor deposition (PECVD) (G2N operation) | $250.00 ($350.00) | $75.00 ($150.00) | hour |
| WLOS cluster sputtering tool (G2N operation) | $250.00 ($350.00) | $75.00 ($150.00) | hour |
| WLO1 or WLO2 cluster tool (G2N operation) | $250.00 ($350.00) | $75.00 ($150.00) | hour |
| AJA Orion Sputtering System (G2N operation) | $125.00 ($150.00) | $62.50 ($100.00) | hour |
| Equipment/Service | Rate external | Rate academic | Period |
|---|---|---|---|
| Dektak 8 (G2N operation) |
$100.00 ($150.00) |
$50.00 ($100.00) | hour |
| Dimension 3100 AFM (G2N operation) | $200.00 ($250.00) | $50.00 ($100.00) | hour |
| Hitachi scanning electron microscope (SEM) (G2N operation) | $60.00 ($125.00) | $25.00 ($75.00) | hour |
| Reichert polylite 88 microscope | $100.00 | $25.00 | hour |
| Raman spectrometer (G2N operation) | $100.00 ($150.00) | $50.00 ($100.00) | hour |
| Equipment/Service | Rate external | Rate academic | Period |
|---|---|---|---|
| Dicing saw (G2N operation) | ($200.00) | $50.00 ($100.00) | hour |
| Kulicke and soffa wire bonder (G2N operation) (limited availability) | $150.00 ($250.00) | $100.00 | hour |
| Equipment/Service | Rate external | Rate academic | Period |
|---|---|---|---|
| Wet processing station | $100.00 ($150.00) | $25.00 ($50.00) | hour |
| Phantom II RIE (G2N operation) | $100.00 ($200.00) | $25.00 ($75.00) | hour |
| Equipment/Service | Rate external | Rate academic | Period |
|---|---|---|---|
| Laurell spinners | $125.00 ($150.00) | $50.00 ($75.00) | hour |
| Lithography wetbench | $100.00 | $50.00 | hour |
| MA6 mask aligner (G2N operation) | $200.00 ($300.00) | $50.00 ($100.00) | hour |
| MJB3 mask aligner (G2N operation) | $200.00 ($300.00) | $50.00 ($100.00) | hour |
