Contact Waterloo Institute for Nanotechnology
Mike & Ophelia Lazaridis Quantum-Nano Centre, Room 3606
University of Waterloo
200 University Ave. W.
Waterloo, ON. N2L 3G1
+1 519 888 4567, ext.38654
The state-of-the-art Molecular Beam Epitaxy (MBE) facility was formally inaugurated on June 4th, 2014. The lab houses a Veeco GEN10 MBE system that enables the production of nanomaterials such as sophisticated III/V semiconductors for devices of the future. The facility will support research programs in photonics to quantum computing.
The MBE facility is led by Professor Zbig Wasilewski, WIN Endowed Chair and Professor at the Department of Electrical and Computer Engineering, who is an acknowledged expert on MBE methods for growing complex, ultrapure, semiconductor materials.
Growth and monitoring tools
- Band-edge thermometry (BET)
- Reflectivity and reflectance corrected pyrometry
- Reflection high energy electron diffraction (RHEED)
- Ion gauges (IG)
- Residual gas analysis (RGA)
- High resolution x-ray diffractometry
- Normanski microscopy