Scanning Transmission Electron Microscope (STEM)

The machine

Carl Zeiss Libra 200MC STEM (PDF)

Specifications

Resolution:

Point: 0.24 nm (high-res)
Information limit: 0.14 nm (HR)
STEM resolution: 0.30 nm (HR)

Energy resolution: == 0.2 eV

0.29 nm (high-tilt)
0.19 nm (HT)
0.45 nm (HT)
 

 
Tilt range:

a/ß ±30°/±30° (HR)

a/ß ±70°/±30° (HT) 

 
Corrected omega filter:
Dispersion: 1.85 µm/eV @ 200 kV
Distortion: 100 mrad @ ?E = 10 eV slit width and 200 kV
               > 150 mrad @ ?E = 20 eV slit width and 200 kV
Non-isochromaticity: < 0.5 eV over Ø 2.5 µm field-of-view
Magnification:
STEM: 2,000x - 5,000,000x
EELS: 20x - 315x (spectrum magnification)

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