@patent {park2011remote,
	title = {Remote plasma source seasoning},
	volume = {US7989365B2},
	year = {2011},
	note = {US Patent 7,989,365},
	edition = {United States of America},
	chapter = {US},
	author = {Park, Soonam and Jeon, Soo and Tran, Toan Q and Yang, Jang-Gyoo and Liang, Qiwei and Lubomirsky, Dmitry}
}
