@article{13, author = {Ali Sohi and Patricia Nieva and Amir Khajepour}, title = {Electrothermomechanical modeling of out-of-plane deformation in single-stepped beams actuated by resistive heating}, year = {2015}, journal = {Journal of Micromechanics and Microengineering}, volume = {25}, number = {3}, pages = {035028}, publisher = {IOP Publishing}, }