@inproceedings{16,
  author = {Ali Sohi and Patricia Nieva},
  title = {A bi-material microbeam based thermal actuator for out-of-plane rotation},
  year = {2014},
  journal = {MOEMS and Miniaturized Systems XIII},
  volume = {8977},
  pages = {89770M},
  publisher = {International Society for Optics and Photonics},
}