@inproceedings{25,
  author = {Najafi Sohi and P Nieva and A Khajepour},
  title = {A smaller footprint MEMS sensor for on-chip temperature measurement},
  year = {2013},
  journal = {Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII},
  volume = {8614},
  pages = {86140B},
  publisher = {International Society for Optics and Photonics},
}