@inproceedings{26,
  author = {Patricia Nieva and Jeremy Godin and Ryan Norris and Ali Sohi and Timothy Leung},
  title = {Effects of dry plasma releasing process parameters and induced in-plane stress on MEMS devices yield},
  year = {2012},
  journal = {Reliability, Packaging, Testing, and Characterization of MEMS/MOEMS and Nanodevices XI},
  volume = {8250},
  pages = {825003},
  publisher = {International Society for Optics and Photonics},
}