@article{28,
  author = {M Shavezipur and P Nieva and SM Hashemi and A Khajepour},
  title = {Linearization and tunability improvement of MEMS capacitors using flexible electrodes and nonlinear structural stiffness},
  year = {2012},
  journal = {Journal of Micromechanics and Microengineering},
  volume = {22},
  number = {2},
  pages = {025022},
  publisher = {IOP Publishing},
}