@article{39,
  author = {M Shavezipur and SM Hashemi and P Nieva and A Khajepour},
  title = {Development of a triangular-plate MEMS tunable capacitor with linear capacitance-voltage response},
  year = {2010},
  journal = {Microelectronic engineering},
  volume = {87},
  number = {9},
  pages = {1721-1727},
  publisher = {Elsevier},
}