@inproceedings{4,
  author = {Alex Gonzalez and Eric Brace and Patricia Nieva},
  title = {Size and Shape Effect in the Determination of the Fracture Strength of Silicon Nitride in MEMS Structures at High Temperatures},
  year = {2018},
  journal = {2018 IEEE 68th Electronic Components and Technology Conference (ECTC)},
  pages = {2457-2463},
  publisher = {IEEE},
}