@inproceedings{41,
  author = {E Bassiachvili and Godin JR and P Nieva and A Khajepour},
  title = {On-Chip Structures for the Determination of the Dopant-Dependent Young s Modulus of Heavily Phosphorus Doped Polysilicon With Stress Compensation},
  year = {2010},
  journal = {ASME International Mechanical Engineering Congress and Exposition},
  volume = {44472},
  pages = {45-50},
}