@inproceedings{43,
  author = {Pezhman Hassanpour and Chris Wong and Patricia Nieva and Amir Khajepour},
  title = {Axial force regulation in MEMS resonant sensors},
  year = {2009},
  journal = {ASME International Mechanical Engineering Congress and Exposition},
  volume = {43857},
  pages = {321-327},
}