@inproceedings{45,
  author = {Mohammad Shavezipur and Chris Wong and Patricia Nieva and Amir Khajepour},
  title = {Design and Modelling of a MEMS Capacitive Temperature Sensor With Linear Capacitance-Temperature Response},
  year = {2009},
  journal = {ASME International Mechanical Engineering Congress and Exposition},
  volume = {43857},
  pages = {513-518},
}