@article{46,
  author = {M Shavezipur and P Nieva and A Khajepour and SM Hashemi},
  title = {Development of parallel-plate-based MEMS tunable capacitors with linearized capacitance-voltage response and extended tuning range},
  year = {2009},
  journal = {Journal of Micromechanics and Microengineering},
  volume = {20},
  number = {2},
  pages = {025009},
  publisher = {IOP Publishing},
}