@inproceedings{47,
  author = {M Shavezipur and P Nieva and A Khajepour and SM Hashemi},
  title = {Effect of Nonlinear Structural Stiffness on the Response of Capacitive MEMS Devices},
  year = {2009},
  journal = {Proc. of the Nanotech Conference and Expo},
  pages = {3-7},
}