@article{48, author = {Caglar Elbuken and Nezih Topaloglu and Patricia Nieva and Mustafa Yavuz and Jan Huissoon}, title = {Modeling and analysis of a 2-DOF bidirectional electro-thermal microactuator}, year = {2009}, journal = {Microsystem technologies}, volume = {15}, number = {5}, pages = {713-722}, publisher = {Springer-Verlag}, }