@inproceedings{53,
  author = {E Bassiachvili and P Nieva and A Khajepour},
  title = {On-Chip Young s Modulus Characterization of the Effect of Phosphorus Heavy Doping on Polysilicon Thin Films},
  year = {2009},
  journal = {ASME International Mechanical Engineering Congress and Exposition},
  volume = {43857},
  pages = {77-83},
}