@article{54,
  author = {Mohammad Shavezipur and Patricia Nieva and Seyed Hashemi and Amir Khajepour},
  title = {A Parallel-plate-based Fishbone-Shape MEMS Tunable Capacitor with Linear Capacitance-Voltage Response},
  year = {2009},
  journal = {Sensors & Transducers},
  volume = {7},
  pages = {15},
  publisher = {IFSA Publishing, SL},
}