@inproceedings{57,
  author = {Mohammad Shavezipur and Seyed Hashemi and Amir Khajepour and Patricia Nieva},
  title = {Development of a linearly tunable modified butterfly-shape MEMS capacitor},
  year = {2008},
  journal = {ASME International Mechanical Engineering Congress and Exposition},
  volume = {48746},
  pages = {495-500},
}