@inproceedings{58, author = {Abdullah Syed and Luye Mu and Mohammad Shavezipur and Patricia Nieva}, title = {Eliminating the galvanic effect for microdevices fabricated with PolyMUMPs®}, year = {2008}, journal = {2008 1st Microsystems and Nanoelectronics Research Conference}, pages = {197-200}, publisher = {IEEE}, }