@inproceedings{60,
  author = {Mohammad Shavezipur and Seyed Hashemi and Amir Khajepour and Patricia Nieva},
  title = {A Linearly Tunable MEMS Capacitor With Segmented Electrode and Enhanced Structure},
  year = {2008},
  journal = {ASME International Mechanical Engineering Congress and Exposition},
  volume = {48746},
  pages = {489-493},
}