@inproceedings{63,
  author = {N Topaloglu and C Elbuken and PM Nieva and M Yavuz and JP Huissoon},
  title = {Modeling and simulation of a 2-DOF bidirectional electrothermal microactuator [6926-05]},
  year = {2008},
  journal = {PROCEEDINGS-SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING},
  volume = {6926},
  pages = {6926},
  publisher = {International Society for Optical Engineering; 1999},
}