@inproceedings{64,
  author = {Ryan Norris and John Hamel and Patricia Nieva},
  title = {Modeling of MEMS high-order mode inter-digital waveform synthesizer for Flexural Plate Array sensors},
  year = {2008},
  journal = {SENSORS, 2008 IEEE},
  pages = {502-505},
  publisher = {IEEE},
}