@inproceedings{68,
  author = {PM Nieva and GG Adams and NE McGruer},
  title = {Design and modeling of a multifunctional MEMS Fabry-Perot sensor for the simultaneous measurement of displacement, pressure, and temperature},
  year = {2007},
  journal = {Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems 2007},
  volume = {6529},
  pages = {65292D},
  publisher = {International Society for Optics and Photonics},
}