@inproceedings{73,
  author = {PM Nieva and NE McGruer and GG Adams},
  title = {Air viscous damping effects in vibrating microbeams [6169-23]},
  year = {2006},
  journal = {PROCEEDINGS-SPIE THE INTERNATIONAL SOCIETY FOR OPTICAL ENGINEERING},
  volume = {6169},
  pages = {61690N},
  publisher = {International Society for Optical Engineering; 1999},
}