@article{74,
  author = {PM Nieva and NE McGruer and GG Adams},
  title = {Design and characterization of a micromachined Fabry-Perot vibration sensor for high-temperature applications},
  year = {2006},
  journal = {Journal of Micromechanics and Microengineering},
  volume = {16},
  number = {12},
  pages = {2618},
  publisher = {IOP Publishing},
}