@inproceedings{75, author = {PM Nieva and NE McGruer and GG Adams}, title = {MEMS-based Fabry-Perot vibration sensor for harsh environments}, year = {2006}, journal = {Smart Structures and Materials 2006: Sensors and Smart Structures Technologies for Civil, Mechanical, and Aerospace Systems}, volume = {6174}, pages = {617426}, publisher = {International Society for Optics and Photonics}, }