@inproceedings{76,
  author = {P Nieva and N McGruer and G Adams},
  title = {A multipurpose optical MEMS sensor for harsh environments},
  year = {2006},
  journal = {2006 NSTI Nanotechnology Conference and Trade Show-NSTI Nanotech 2006 Technical Proceedings},
  volume = {3},
  pages = {419-422},
}