@article{79,
  author = {Haruna Tada and Amy Kumpel and Richard Lathrop and John Slanina and Patricia Nieva and Paul Zavracky and Ioannis Miaoulis and Peter Wong},
  title = {Thermal expansion coefficient of polycrystalline silicon and silicon dioxide thin films at high temperatures},
  year = {2000},
  journal = {Journal of applied physics},
  volume = {87},
  number = {9},
  pages = {4189-4193},
  publisher = {American Institute of Physics},
}