@article{80, author = {AR Abramson and P Nieva and H Tada and P Zavracky and IN Miaoulis and PY Wong}, title = {Effect of doping level during rapid thermal processing of multilayer structures}, year = {1999}, journal = {Journal of materials research}, volume = {14}, number = {6}, pages = {2402-2410}, publisher = {Springer International Publishing}, }