@article{81,
  author = {Melissa Bargmann and Amy Kumpel and Haruna Tada and Patricia Nieva and Paul Zavracky and Ioannis Miaoulis and Peter Wong},
  title = {Temperature-dependent coefficient of thermal expansion of silicon nitride films used in microelectromechanical systems},
  year = {1999},
  journal = {MRS Online Proceedings Library},
  volume = {605},
  number = {1},
  pages = {235-240},
  publisher = {Springer International Publishing},
}